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RFG500 - 500Watt
380kHz RF Generator
The RFG500 380kHz RF generator is a precision unit intended for scientific and industrial applications. Its robust construction using the latest in switch mode and solid-state design techniques ensure a long and trouble -free life even in harsh environments. The
main features are:
Half-rack, 2U (89mm) high Microprocessor display of incident (forward) power, reflected power and unit status Precision power control +/- 1% of set point. Fast pulse operation from TTL/CMOS input The output power of the generator is fully adjustable between zero and maximum power. The feedback control system ensures that the set output power remains constant and repeatable. Incident (forward) and reflected power measurements are internally calibrated to give high accuracy throughout the power range. An external voltage of 0 to 5Volts can be used to control the output. This is particularly useful in sputter coating applications where the d.c. voltage developed across the plasma dark space can be controlled rather than the RF power.
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