RFG1K5 – 1500-Watt Air-Cooled RF Generator

The RFG1K5, 1500-Watt output RF generator is a precision unit intended for both scientific and industrial applications. The robust construction, using the latest in switch mode and solid state design techniques, ensure a long and trouble -free life even in harsh environments.

It is recommended that the generator be used in conjunction with either a manual (Model MN2K) or automatic impedance matching network (Model AMN2KR). Please see the matching network section for their full technical specifications.

The main features of the generator are:

• Proven design and track record
• 19” rack, 4U (177mm) high
• Individual LED displays for incident (forward) and reflected power.
• Precision power control +/- 1% of set point.
• Common exciter input/output
• Fast pulse operation from TTL/CMOS input.
• 13.56MHz and 27.12MHz frequencies available as standard. Non-standard frequencies are available – please contact factory for details.
• Air-cooled

The output power of the generator is fully adjustable between zero and maximum power. The feedback control system ensures that the set output power remains constant and repeatable. Incident (forward) and reflected power measurements are internally calibrated to give high accuracy throughout the power range.

An external voltage of 0 to 5Volts can be used to control the output. This is particularly useful in sputter coating applications where the D.C. voltage developed across the plasma dark space can be controlled rather than the RF power.

The design of the generator is modular with separate RF driver; switch mode power supplies and RF power amplifiers. These units are easily removed from the chassis in the unlikely event that a replacement becomes necessary.

• RFG1k5 RF Generator