RFG5K - 5kW RF GENERATOR

The RFG5K, 5,000-Watt output RF generator is a precision unit intended for both scientific and industrial applications. The robust construction, using tried and tested components together with the latest design techniques, ensure a long and trouble-free life even in harsh environments. The generator is totally air cooled which considerably reduces its service requirements and allows simple installation.

It is recommended that the generator be used in conjunction with either an automatic impedance matching network (Model AMN5KR). Please see the separate brochure for details. If an automatic network is used, the controller can be fitted to the generator cabinet.

 The main features of the generator are:

• Proven design and track record
• Air cooled
• Individual LED displays for incident (forward) and reflected power.
• Precision power control +/- 1% of set point.
• Common exciter input/output
• 13.56MHz, 27.12MHz and 40.68MHz frequencies available as standard. Non-standard frequencies are available – please contact factory for details.

·        Fast pulse operation from TTL/CMOS input (Optional)

·        Solid State/Power Tube design for reliable performance

The output power of the generator is fully adjustable between zero and maximum power. The feedback control system ensures that the set output power remains constant and repeatable. Incident (forward) and reflected power measurements are internally calibrated to give high accuracy throughout the power range.

An external voltage of 0 to 5Volts can be used to control the output. This is particularly useful in sputter coating applications where the D.C. voltage developed across the plasma dark space can be controlled rather than the RF.

• RFG5k RF Generator