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RFG600 - 600Watt RF
Generator
The RFG600 RF generator is a precision unit intended for scientific and industrial applications. Its robust construction using the latest in switch mode and solid-state design techniques ensure a long and trouble -free life even in harsh environments. It is recommended that the generator be used in conjunction with either a manual (Model MN600) or automatic impedance matching network (Model AMN600R). Please see the matching network section for their full technical specifications. The
main features are:
Half-rack, 2U (89mm) high Microprocessor display of incident (forward) power, reflected power and unit status Precision power control +/- 1% of set point. Fast pulse operation from TTL/CMOS input (500W max.). The
output power of the generator is fully adjustable between zero and maximum
power. The feedback control system ensures that the set output power remains
constant and repeatable. Incident (forward) and reflected power measurements are
internally calibrated to give high accuracy throughout the power range. An
external voltage of 0 to 5Volts can be used to control the output. This is
particularly useful in sputter coating applications where the d.c. voltage
developed across the plasma dark space can be controlled rather than the RF
power.
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